Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7723014 | System and method for photolithography in semiconductor manufacturing | Kuei-Shun Chen, Chin-Hsiang Lin, Tsai-Cheng Gau, Hsiao-Tzu Lu, Fu-Jye Liang | 2010-05-25 |
| 7501226 | Immersion lithography system with wafer sealing mechanisms | Burn Jeng Lin, Tsai-Sheng Gau, Ru-Gun Liu, Shing Shen Yu, Jen-Chieh Shih | 2009-03-10 |