Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7501226 | Immersion lithography system with wafer sealing mechanisms | Burn Jeng Lin, Tsai-Sheng Gau, Chun-Kung Chen, Ru-Gun Liu, Jen-Chieh Shih | 2009-03-10 |
SY
Shing Shen Yu
Overall (All Time): #3,319,591 of 4,157,543Top 80%
1
Patents All Time