Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398468 | Semiconductor tool having controllable ambient environment processing zones | Chih-Ming Chen, Chung-Yi Yu, Sheng-Hsun Lu | 2025-08-26 |
| 12355370 | Self-aligned dielectric liner structure for protection in MEMS comb actuator | Chih-Ming Chen, Chung-Yi Yu, Lung Yuan Pan | 2025-07-08 |
| 12254262 | Calibration method for emulating group III-V semiconductor device and method for manufacturing group III-V semiconductor device | Chia-Chung Chen, Shufang Fu, Kuan-Hung Liu, Fu-Yu Shih, Chi-Feng Huang +1 more | 2025-03-18 |
| 11869761 | Back-side deep trench isolation structure for image sensor | Yu-Hung Cheng, Chun-Tsung Kuo, Jiech-Fun Lu, Min-Ying Tsai, Ching-I Li | 2024-01-09 |
| 11832520 | Voltage breakdown uniformity in piezoelectric structure for piezoelectric devices | Chih-Ming Chen, Chung-Yi Yu | 2023-11-28 |
| 11814731 | Semiconductor tool having controllable ambient environment processing zones | Chih-Ming Chen, Chung-Yi Yu, Sheng-Hsun Lu | 2023-11-14 |
| 11387748 | Self-aligned dielectric liner structure for protection in MEMS comb actuator | Chih-Ming Chen, Chung-Yi Yu, Lung Yuan Pan | 2022-07-12 |
| 11047050 | Semiconductor tool having controllable ambient environment processing zones | Chih-Ming Chen, Chung-Yi Yu, Sheng-Hsun Lu | 2021-06-29 |