Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398468 | Semiconductor tool having controllable ambient environment processing zones | Chiao-Chun Hsu, Chih-Ming Chen, Chung-Yi Yu | 2025-08-26 |
| 11814731 | Semiconductor tool having controllable ambient environment processing zones | Chiao-Chun Hsu, Chih-Ming Chen, Chung-Yi Yu | 2023-11-14 |
| 11047050 | Semiconductor tool having controllable ambient environment processing zones | Chiao-Chun Hsu, Chih-Ming Chen, Chung-Yi Yu | 2021-06-29 |