CL

Chi-Lin Lu

TSMC: 1 patents #8,466 of 12,232Top 70%
Overall (All Time): #3,189,125 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8609545 Method to improve mask critical dimension uniformity (CDU) I-Hsiung Huang, Heng-Jen Lee, Sheng-Chi Chin, Yao-Ching Ku 2013-12-17