Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8609545 | Method to improve mask critical dimension uniformity (CDU) | I-Hsiung Huang, Heng-Jen Lee, Sheng-Chi Chin, Yao-Ching Ku | 2013-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8609545 | Method to improve mask critical dimension uniformity (CDU) | I-Hsiung Huang, Heng-Jen Lee, Sheng-Chi Chin, Yao-Ching Ku | 2013-12-17 |