Issued Patents All Time
Showing 151–168 of 168 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5316891 | Fine pattern forming method | Kazuhiko Hashimoto | 1994-05-31 |
| 5312776 | Method of preventing the corrosion of metallic wirings | Tomoyasu Murakami, Michinari Yamanaka, Kousaku Yano, Noboru Nomura, Staoshi Ueda +3 more | 1994-05-17 |
| 5272036 | Pattern forming contrast enhanced material utilizing water soluble photosensitive diazo compound and pattern forming method | Yoshiyuki Tani, Kazufumi Ogawa, Fumiyoshi Urano, Masaaki Nakahata | 1993-12-21 |
| 5250669 | Photosensitive compound | Kazufumi Ogawa, Keiji Ohno, Mamoru Nagoya | 1993-10-05 |
| 5169741 | Method for forming high sensitivity positive patterns employing a material containing a photosensitive compound having a diazo group, an alkaline-soluble polymer, a compound capable of adjusting the pH to 4 or less and a solvent | Yoshiyuki Tani | 1992-12-08 |
| 4923948 | Curable composition | Yasuo Matsuki, Yosinobu Kariya, Hiroharu Ikeda, Yoshihiro Hosaka | 1990-05-08 |
| 4910123 | Pattern forming method | Masaru Sasago, Kazufumi Ogawa | 1990-03-20 |
| 4849323 | Pattern forming method using contrast enhanced material | Masaru Sasago, Kazufumi Ogawa | 1989-07-18 |
| 4840872 | Pattern forming method by use of X-ray exposure | Masaru Sasago, Kazufumi Ogawa | 1989-06-20 |
| 4841341 | Integrator for an exposure apparatus or the like | Kazufumi Ogawa, Masaru Sasago, Ken Ishihara | 1989-06-20 |
| 4812880 | Exposure apparatus | Kazufumi Ogawa, Masaru Sasago, Takeshi Ishihara | 1989-03-14 |
| 4805002 | Exposure apparatus | Masaru Sasago, Kazufumi Ogawa, Takeshi Ishihara | 1989-02-14 |
| 4805000 | Exposure apparatus | Kazufumi Ogawa, Masaru Sasago, Takeshi Ishihara | 1989-02-14 |
| 4782368 | Method for correction for chromatic aberration and exposure apparatus using the same | Kazufumi Ogawa, Masaru Sasago, Takeshi Ishihara | 1988-11-01 |
| 4745042 | Water-soluble photopolymer and method of forming pattern by use of the same | Masaru Sasago, Kenichi Takeyama, Noboru Nomura | 1988-05-17 |
| 4724466 | Exposure apparatus | Kazufumi Ogawa, Masaru Sasago, Takeshi Ishihara | 1988-02-09 |
| 4696800 | Ozone generating apparatus | Toshihiko Sasaki, Yooji Sunayama, Isao Yoshida | 1987-09-29 |
| 4182813 | Process for the preparation of 1,2-polybutadiene | Kenya Makino, Koei Komatsu, Yasumasa Takeuchi | 1980-01-08 |