Issued Patents All Time
Showing 51–75 of 168 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7169530 | Polymer compound, resist material and pattern formation method | Shinji Kishimura, Masaru Sasago, Mitsuru Ueda, Hirokazu Imori, Toshiaki Fukuhara | 2007-01-30 |
| 7166418 | Sulfonamide compound, polymer compound, resist material and pattern formation method | Shinji Kishimura, Masaru Sasago, Mitsuru Ueda, Hirokazu Imori, Toshiaki Fukuhara | 2007-01-23 |
| 7135273 | Pattern formation method | Masaru Sasago | 2006-11-14 |
| 7132224 | Pattern formation method | Masaru Sasago | 2006-11-07 |
| 7125643 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Shinji Kishimura +3 more | 2006-10-24 |
| 7125642 | Sulfonates, polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Shinji Kishimura +3 more | 2006-10-24 |
| 7125641 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Shinji Kishimura +3 more | 2006-10-24 |
| 7094521 | Pattern formation method and exposure system | Masaru Sasago | 2006-08-22 |
| 7078147 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Shinji Kishimura | 2006-07-18 |
| 7071084 | Methods for forming wiring and electrode | Yasuaki Yokoyama, Isamu Yonekura, Takashi Satoh, Tamaki Wakasaki, Yasumasa Takeuchi | 2006-07-04 |
| 7067231 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Shinji Kishimura +3 more | 2006-06-27 |
| 7060775 | Polymer compound, resist material and pattern formation method | Shinji Kishimura, Masaru Sasago, Mitsuru Ueda, Hirokazu Imori, Toshiaki Fukuhara | 2006-06-13 |
| 7041428 | Pattern-forming material and method of forming pattern | Shinji Kishimura, Masaru Sasago, Mitsuru Ueda, Tsuyohiko Fujigaya | 2006-05-09 |
| 7029827 | Pattern formation method | Masaru Sasago | 2006-04-18 |
| 7022466 | Pattern formation method | Masaru Sasago | 2006-04-04 |
| 7011934 | Pattern formation method | Masaru Sasago | 2006-03-14 |
| 7005228 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Yoshio Kawai, Masaru Sasago, Shinji Kishimura +4 more | 2006-02-28 |
| 7001707 | Resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Yoshio Kawai, Masaru Sasago, Shinji Kishimura +3 more | 2006-02-21 |
| 6992015 | Pattern formation method | Masaru Sasago | 2006-01-31 |
| 6949329 | Pattern formation method | Masaru Sasago | 2005-09-27 |
| 6946235 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Shinji Kishimura +3 more | 2005-09-20 |
| 6936401 | Pattern formation material and pattern formation method | Masaru Sasago | 2005-08-30 |
| 6933095 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Shinji Kishimura +4 more | 2005-08-23 |
| 6916592 | Esters, polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Shinji Kishimura +3 more | 2005-07-12 |
| 6913857 | Exposure mask, method for manufacturing the mask, and exposure method | Masaru Sasago, Tokushige Hisatsugu | 2005-07-05 |