Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913857 | Exposure mask, method for manufacturing the mask, and exposure method | Masaru Sasago, Masayuki Endo | 2005-07-05 |
| 4349409 | Method and apparatus for plasma etching | Hikou Shibayama, Tetsuya Ogawa, Makoto Kosugi, Koichi Kobayashi | 1982-09-14 |