Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4349409 | Method and apparatus for plasma etching | Tetsuya Ogawa, Makoto Kosugi, Tokushige Hisatsugu, Koichi Kobayashi | 1982-09-14 |
HS
Hikou Shibayama
Overall (All Time): #4,075,658 of 4,157,543Top 100%
1
Patents All Time