Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7843040 | Gallium nitride baseplate and epitaxial substrate | Akinori Koukitu, Yoshinao Kumagai, Yoshiki Miura, Fumitaka Sato | 2010-11-30 |
| 7518216 | Gallium nitride baseplate, epitaxial substrate, and method of forming gallium nitride | Akinori Koukitu, Yoshinao Kumagai, Yoshiki Miura, Fumitaka Sato | 2009-04-14 |
| 7195022 | Production apparatus for producing gallium nitride semiconductor film and cleaning apparatus for exhaust gas | Kenji Otsuka, Naoki Muranaga | 2007-03-27 |
| 6387722 | Methods for preparing an epitaxial wafer having a gallium nitride epitaxial layer deposited on a semiconductor substrate | Kensaku Motoki, Masato Matsushima, Katsushi Akita, Mitsuru Shimazu, Hisashi Seki +1 more | 2002-05-14 |
| 6270587 | Epitaxial wafer having a gallium nitride epitaxial layer deposited on semiconductor substrate and method for preparing the same | Kensaku Motoki, Masato Matsushima, Katsushi Akita, Mitsuru Shimazu, Hisashi Seki +1 more | 2001-08-07 |
| 5843590 | Epitaxial wafer and method of preparing the same | Yoshiki Miura, Keiichiro Fujita, Masato Matsushima, Hideki Matsubara, Shigenori Takagishi +2 more | 1998-12-01 |