| 12252803 |
N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer |
Koichi Maegawa, Yasuhito Narushima, Yasufumi KAWAKAMI, Ayumi Kihara |
2025-03-18 |
| 11702760 |
N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer |
Koichi Maegawa, Yasuhito Narushima, Yasufumi KAWAKAMI, Ayumi Kihara |
2023-07-18 |
| 11639560 |
Deposit removing device and deposit removing method |
Takuya Yotsui, Koichi Maegawa |
2023-05-02 |
| 11377755 |
N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer |
Koichi Maegawa, Yasuhito Narushima, Yasufumi KAWAKAMI, Yuuji Tsutsumi |
2022-07-05 |
| 11242617 |
Method for producing silicon single crystal |
Koichi Maegawa, Yasuhito Narushima, Yasufumi KAWAKAMI |
2022-02-08 |
| 10916425 |
Method for manufacturing silicon single crystal, flow straightening member, and single crystal pulling device |
Yasuhito Narushima, Koichi Maegawa, Yasufumi KAWAKAMI |
2021-02-09 |
| 10294583 |
Producing method and apparatus of silicon single crystal, and silicon single crystal ingot |
Yasuhito Narushima, Shinichi Kawazoe, Masahiro Irokawa, Toshimichi Kubota |
2019-05-21 |
| 10233562 |
Method for producing single crystal, and method for producing silicon wafer |
Yasuhito Narushima, Toshimichi Kubota, Masayuki Uto |
2019-03-19 |
| 10233564 |
Manufacturing method of monocrystalline silicon and monocrystalline silicon |
Yasuhito Narushima, Shinichi Kawazoe |
2019-03-19 |
| 9212431 |
Silicon single crystal pulling device and graphite member used therein |
Shinichi Kawazoe, Yasuhito Narushima, Tsuneaki Tomonaga, Toshimichi Kubota |
2015-12-15 |
| 9074298 |
Processes for production of silicon ingot, silicon wafer and epitaxial wafer, and silicon ingot |
Shinichi Kawazoe, Toshimichi Kubota, Yasuhito Narushima |
2015-07-07 |
| 8961686 |
Method of manufacturing monocrystal, flow straightening cylinder, and monocrystal pulling-up device |
Shinichi Kawazoe, Yasuhito Narushima, Toshimichi Kubota |
2015-02-24 |
| 8920561 |
Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt |
Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota, Tomohiro Fukuda |
2014-12-30 |
| 8888911 |
Method of producing single crystal silicon |
Masayuki Uto, Tuneaki Tomonaga, Toshimichi Kubota, Yasuhito Narushima |
2014-11-18 |
| 8852340 |
Method for manufacturing single crystal |
Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota |
2014-10-07 |
| 8840721 |
Method of manufacturing silicon single crystal |
Yasuhito Narushima, Toshimichi Kubota |
2014-09-23 |
| 8747551 |
Process for production of silicon single crystal, and highly doped N-type semiconductor substrate |
Shinichi Kawazoe, Yasuhito Narushima, Toshimichi Kubota |
2014-06-10 |
| 8715416 |
Doping apparatus for simultaneously injecting two dopants into a semiconductor melt at different positions and method for manufacturing silicon single crystal using the doping apparatus |
Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota |
2014-05-06 |
| 8580032 |
Method for manufacturing single crystal |
Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota |
2013-11-12 |
| 8574363 |
Process for production of silicon single crystal, and highly doped N-type semiconductor substrate |
Shinichi Kawazoe, Yasuhito Narushima, Toshimichi Kubota |
2013-11-05 |
| 8535439 |
Manufacturing method for silicon single crystal |
Yasuhito Narushima, Toshimichi Kubota, Shinichi Kawazoe, Tomohiro Fukuda |
2013-09-17 |
| 8518180 |
Silicon single crystal pull-up apparatus having a sliding sample tube |
Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota, Tomohiro Fukuda |
2013-08-27 |
| 8283241 |
Dopant implanting method and doping apparatus |
Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota |
2012-10-09 |
| 8110042 |
Method for manufacturing single crystal |
Yasuhito Narushima, Shinichi Kawazoe, Tsuneaki Tomonaga, Yasuyuki Ohta, Toshimichi Kubota +1 more |
2012-02-07 |
| 8043428 |
Process for production of silicon single crystal |
Shinichi Kawazoe, Toshimichi Kubota, Yasuhito Narushima |
2011-10-25 |