Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12252803 | N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer | Koichi Maegawa, Yasuhito Narushima, Yasufumi KAWAKAMI, Ayumi Kihara | 2025-03-18 |
| 11702760 | N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer | Koichi Maegawa, Yasuhito Narushima, Yasufumi KAWAKAMI, Ayumi Kihara | 2023-07-18 |
| 11639560 | Deposit removing device and deposit removing method | Takuya Yotsui, Koichi Maegawa | 2023-05-02 |
| 11377755 | N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer | Koichi Maegawa, Yasuhito Narushima, Yasufumi KAWAKAMI, Yuuji Tsutsumi | 2022-07-05 |
| 11242617 | Method for producing silicon single crystal | Koichi Maegawa, Yasuhito Narushima, Yasufumi KAWAKAMI | 2022-02-08 |
| 10916425 | Method for manufacturing silicon single crystal, flow straightening member, and single crystal pulling device | Yasuhito Narushima, Koichi Maegawa, Yasufumi KAWAKAMI | 2021-02-09 |
| 10294583 | Producing method and apparatus of silicon single crystal, and silicon single crystal ingot | Yasuhito Narushima, Shinichi Kawazoe, Masahiro Irokawa, Toshimichi Kubota | 2019-05-21 |
| 10233562 | Method for producing single crystal, and method for producing silicon wafer | Yasuhito Narushima, Toshimichi Kubota, Masayuki Uto | 2019-03-19 |
| 10233564 | Manufacturing method of monocrystalline silicon and monocrystalline silicon | Yasuhito Narushima, Shinichi Kawazoe | 2019-03-19 |
| 9212431 | Silicon single crystal pulling device and graphite member used therein | Shinichi Kawazoe, Yasuhito Narushima, Tsuneaki Tomonaga, Toshimichi Kubota | 2015-12-15 |
| 9074298 | Processes for production of silicon ingot, silicon wafer and epitaxial wafer, and silicon ingot | Shinichi Kawazoe, Toshimichi Kubota, Yasuhito Narushima | 2015-07-07 |
| 8961686 | Method of manufacturing monocrystal, flow straightening cylinder, and monocrystal pulling-up device | Shinichi Kawazoe, Yasuhito Narushima, Toshimichi Kubota | 2015-02-24 |
| 8920561 | Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt | Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota, Tomohiro Fukuda | 2014-12-30 |
| 8888911 | Method of producing single crystal silicon | Masayuki Uto, Tuneaki Tomonaga, Toshimichi Kubota, Yasuhito Narushima | 2014-11-18 |
| 8852340 | Method for manufacturing single crystal | Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota | 2014-10-07 |
| 8840721 | Method of manufacturing silicon single crystal | Yasuhito Narushima, Toshimichi Kubota | 2014-09-23 |
| 8747551 | Process for production of silicon single crystal, and highly doped N-type semiconductor substrate | Shinichi Kawazoe, Yasuhito Narushima, Toshimichi Kubota | 2014-06-10 |
| 8715416 | Doping apparatus for simultaneously injecting two dopants into a semiconductor melt at different positions and method for manufacturing silicon single crystal using the doping apparatus | Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota | 2014-05-06 |
| 8580032 | Method for manufacturing single crystal | Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota | 2013-11-12 |
| 8574363 | Process for production of silicon single crystal, and highly doped N-type semiconductor substrate | Shinichi Kawazoe, Yasuhito Narushima, Toshimichi Kubota | 2013-11-05 |
| 8535439 | Manufacturing method for silicon single crystal | Yasuhito Narushima, Toshimichi Kubota, Shinichi Kawazoe, Tomohiro Fukuda | 2013-09-17 |
| 8518180 | Silicon single crystal pull-up apparatus having a sliding sample tube | Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota, Tomohiro Fukuda | 2013-08-27 |
| 8283241 | Dopant implanting method and doping apparatus | Yasuhito Narushima, Shinichi Kawazoe, Toshimichi Kubota | 2012-10-09 |
| 8110042 | Method for manufacturing single crystal | Yasuhito Narushima, Shinichi Kawazoe, Tsuneaki Tomonaga, Yasuyuki Ohta, Toshimichi Kubota +1 more | 2012-02-07 |
| 8043428 | Process for production of silicon single crystal | Shinichi Kawazoe, Toshimichi Kubota, Yasuhito Narushima | 2011-10-25 |