| 12031231 |
Low resistivity wafer |
Yasuhito Narushima |
2024-07-09 |
| 11598023 |
Low resistivity wafer and method of manufacturing thereof |
Yasuhito Narushima |
2023-03-07 |
| 11047065 |
Method for producing silicon single crystal, heat shield, and single crystal pulling device |
Yasuhito Narushima |
2021-06-29 |
| 10329686 |
Method for producing single crystal |
Yasuhito Narushima, Toshimichi Kubota |
2019-06-25 |
| 10233562 |
Method for producing single crystal, and method for producing silicon wafer |
Yasuhito Narushima, Toshimichi Kubota, Fukuo Ogawa |
2019-03-19 |
| 10227710 |
Manufacturing method of silicon monocrystal |
Yasuhito Narushima, Toshimichi Kubota |
2019-03-12 |
| 10100429 |
Method for producing a silicon single crystal doped with red phosphorous with reduced number of stacking faults and method for producing a silicon wafer using the same |
Yasuhito Narushima, Toshimichi Kubota |
2018-10-16 |
| 8888911 |
Method of producing single crystal silicon |
Tuneaki Tomonaga, Toshimichi Kubota, Fukuo Ogawa, Yasuhito Narushima |
2014-11-18 |