Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11639560 | Deposit removing device and deposit removing method | Fukuo Ogawa, Koichi Maegawa | 2023-05-02 |
| 11426775 | Cleaning method, method for producing silicon single crystal, and cleaning device | Koichi Maegawa, Satoru Hamakawa | 2022-08-30 |
| 9593433 | Crystal holding mechanism of single crystal pulling device and method for producing single crystal ingot | Ayumi Suda | 2017-03-14 |
| 9145620 | Single crystal pulling apparatus | Shuichi Inami, Ken Hamada, Hiroaki Taguchi, Takashi Atami | 2015-09-29 |