Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12252803 | N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer | Koichi Maegawa, Yasuhito Narushima, Yasufumi KAWAKAMI, Fukuo Ogawa | 2025-03-18 |
| 11702760 | N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer | Koichi Maegawa, Yasuhito Narushima, Yasufumi KAWAKAMI, Fukuo Ogawa | 2023-07-18 |
| 8361223 | Method for measuring liquid level in single crystal pulling apparatus employing CZ method | Toshio Hayashida, Takuaki Takami | 2013-01-29 |
| 8130386 | Position measuring method | Toshio Hayashida, Naoji Mitani | 2012-03-06 |
| 8115908 | Position measuring device and position measuring method in semiconductor single crystal manufacturing device | Toshio Hayashida, Naoji Mitani | 2012-02-14 |