Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6012964 | Carrier and CMP apparatus | Hatsuyuki Arai, Shigeto Izumi, Xu-Jin Wang, Misuo Sugiyama, Hisato Matsubara +1 more | 2000-01-11 |
| 5810028 | Washing apparatus for disc-like workpieces | Masahiro Ichikawa | 1998-09-22 |