Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008777 | Method for manufacturing semiconductor device and the semiconductor device | — | 2011-08-30 |
| 7879513 | Method for correcting mask | — | 2011-02-01 |
| 7655377 | Antireflection film and exposure method | Nobuyuki Matsuzawa, Yoko Watanabe, Boontarika Thunnakart, Yuko Yamaguchi | 2010-02-02 |
| 7582411 | Antireflective film and exposure method | Nobuyuki Matsuzawa, Yoko Watanabe, Boontarika Thunnakart | 2009-09-01 |
| 7525733 | Solid-state imaging device and method for manufacturing the same | — | 2009-04-28 |
| 7473494 | Exposure mask and mask pattern production method | Kazuharu Inoue | 2009-01-06 |
| 7438996 | Mask correcting method | — | 2008-10-21 |
| 7379639 | Lens assembly and electronic apparatus using the same | Kazuharu Inoue | 2008-05-27 |
| 7199042 | Semiconductor device with multi-layered wiring arrangement including reinforcing patterns, and production method for manufacturing such semiconductor device | — | 2007-04-03 |
| 7075561 | Image printing apparatus and color misregistration correction method | Tomoo Kudou | 2006-07-11 |
| 6924206 | Method of manufacturing a semiconductor capacitive element in a semiconductor device | — | 2005-08-02 |
| 6849920 | Semiconductor capacitive element, method for manufacturing same and semiconductor device provided with same | — | 2005-02-01 |
| 6730925 | Method and apparatus for projection exposure and device manufacturing method | — | 2004-05-04 |
| 6721039 | Exposure method, exposure apparatus and device producing method | — | 2004-04-13 |
| 6538723 | SCANNING EXPOSURE IN WHICH AN OBJECT AND PULSED LIGHT ARE MOVED RELATIVELY, EXPOSING A SUBSTRATE BY PROJECTING A PATTERN ON A MASK ONTO THE SUBSTRATE WITH PULSED LIGHT FROM A LIGHT SOURCE, LIGHT SOURCES THEREFOR, AND METHODS OF MANUFACTURING | Shigeru Hagiwara | 2003-03-25 |
| 6501535 | Exposure control method and apparatus | — | 2002-12-31 |
| RE37309 | Scanning exposure apparatus | Toshiharu Nakashima, Masato Hamatani | 2001-08-07 |
| 6154270 | Scanning exposure method and apparatus | — | 2000-11-28 |
| 6154269 | Method of evaluating performance of a scan-type exposure apparatus | — | 2000-11-28 |
| 6124064 | Light exposure controlling method | — | 2000-09-26 |
| 5965308 | Method of controlling exposure | — | 1999-10-12 |
| 5929977 | Exposure apparatus and exposure quantity control method | — | 1999-07-27 |
| 5898480 | Exposure method | — | 1999-04-27 |
| 5728495 | Scanning exposure method and apparatus | — | 1998-03-17 |
| 5659383 | Exposure apparatus and exposure quantity control method | — | 1997-08-19 |