Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5574537 | Apparatus for controlling light quantity using acousto-optic modulator for selecting 0th-order diffracted beam | — | 1996-11-12 |
| 5534970 | Scanning exposure apparatus | Toshiharu Nakashima, Masato Hamatani | 1996-07-09 |
| 5473412 | Energy amount controlling method | — | 1995-12-05 |
| 5044891 | Variable displacement diaphragm pump | — | 1991-09-03 |
| 4856966 | Variable displacement diaphragm pump | — | 1989-08-15 |