Issued Patents All Time
Showing 201–225 of 251 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685950 | Dry etching method | — | 1997-11-11 |
| 5628954 | Process for detecting fine particles | — | 1997-05-13 |
| 5591302 | Process for etching copper containing metallic film and for forming copper containing metallic wiring | Keiji Shinohara, Yukihiro Kamide, Toshiharu Yanagida | 1997-01-07 |
| 5573981 | Method of removing residual charges of an electrostatic chuck used in a layer deposition process | — | 1996-11-12 |
| 5569627 | Process for etching copper containing metallic film and for forming copper containing metallic wiring | Keiji Shinohara, Yukihiro Kamide, Toshiharu Yanagida | 1996-10-29 |
| 5514603 | Manufacturing method for diamond semiconductor device | — | 1996-05-07 |
| 5508415 | Iminothiazolines, their production and use as herbicides, and intermediates for their production | Shinichi Kawamura, Keiichi Izumi, Yuzuru Sanemitsu, Tatsuhiro Hamada, Hideyuki Shibata +1 more | 1996-04-16 |
| 5508208 | Method of manufacturing diamond semiconductor | — | 1996-04-16 |
| 5505322 | Process for etching copper containing metallic film and forming copper containing metallic wiring | Keiji Shinohara, Yukihiro Kamide, Toshiharu Yanagida | 1996-04-09 |
| 5502008 | Method for forming metal plug and/or wiring metal layer | Hideaki Hayakawa, Tetsuo Gocho | 1996-03-26 |
| 5496506 | Process for removing fine particles | — | 1996-03-05 |
| 5459277 | Iminothiazolines, their production and use as herbicides, and intermediates for their production | Shinichi Kawamura, Keiichi Izumi, Yuzuru Sanemitsu, Ryo Sato, Tatsuhiro Hamada +1 more | 1995-10-17 |
| 5426337 | Sheet metal casing for a small electric motor | Kyoji Kobayashi, Atsushi Inagaki, Takanori Saito, Yoshimi Takano | 1995-06-20 |
| 5426188 | Iminothiazolines, their production and use as herbicides, and intermediates for their production | Shinichi Kawamura, Keiichi Izumi, Yuzuru Sanemitsu, Tatsuhiro Hamada, Hideyuki Shibata +1 more | 1995-06-20 |
| 5409790 | Process for fabricating masks for use in X-ray lithography | — | 1995-04-25 |
| 5403948 | 5-substituted-2,4-diphenylpyrimidine derivatives, their production and use | Yuzuru Sanemitsu, Shinichi Kawamura | 1995-04-04 |
| 5393374 | Method of ashing | Shingo Kadomura | 1995-02-28 |
| 5384088 | Oxide superconductive material of T1 (thallium) and Pb (lead) system and method for manufacturing the same | Masahiro Seido, Akira Nomoto, Tomoichi Kamo, Katsuzo Aihara | 1995-01-24 |
| 5374591 | Method of making a metal plug | Toshiaki Hasegawa | 1994-12-20 |
| 5370769 | Dry etching method of GaAs | Shingo Kadomura | 1994-12-06 |
| 5360912 | Process of producing iminothiazoline derivatives | Shinichi Kawamura, Yuzuru Sanemitsu | 1994-11-01 |
| 5350736 | Iminothiazolines, their production and use as herbicides, and intermediates for their production | Shinichi Kawamura, Keiichi Izumi, Yuzuru Sanemitsu, Ryo Sato, Tatsuhiro Hamada +1 more | 1994-09-27 |
| 5349108 | 5-substituted-2,4-diphenylpyrimidine derivatives, their production and use | Yuzuru Sanemitsu, Shinichi Kawamura, Nobuaki Mito, Tatsuhiro Hamada, Ryo Yoshida | 1994-09-20 |
| 5326404 | Plasma processing apparatus | — | 1994-07-05 |
| 5292715 | Iminothiazolines, their production and use as herbicides | Shinichi Kawamura, Keiichi Izumi, Yuzuru Sanemitsu, Ryo Sato, Tatsuhiro Hamada +1 more | 1994-03-08 |