Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8197597 | Gallium trichloride injection scheme | Chantal Arena | 2012-06-12 |
| 8133806 | Systems and methods for forming semiconductor materials by atomic layer deposition | — | 2012-03-13 |
| 7981791 | Thin films | Suvi Haukka, Ivo Raaijmakers, Wei Li, Juhana Kostamo, Hessel Sprey | 2011-07-19 |
| 7964513 | Method to form ultra high quality silicon-containing compound layers | Michael A. Todd, Keith Doran Weeks, Christophe Pomarede | 2011-06-21 |
| 7651953 | Method to form ultra high quality silicon-containing compound layers | Michael A. Todd, Keith Doran Weeks, Christophe Pomarede | 2010-01-26 |
| 7452757 | Silicon-on-insulator structures and methods | Ivo Raaijmakers, Chantal Arena | 2008-11-18 |
| 7297641 | Method to form ultra high quality silicon-containing compound layers | Michael A. Todd, Keith Doran Weeks, Christophe Pomarede | 2007-11-20 |
| 6933225 | Graded thin films | Ivo Raaijmakers, Suvi Haukka | 2005-08-23 |
| 6703708 | Graded thin films | Ivo Raaijmakers, Suvi Haukka | 2004-03-09 |
| 6544900 | In situ dielectric stacks | Ivo Raaijmakers | 2003-04-08 |
| 6534395 | Method of forming graded thin films using alternating pulses of vapor phase reactants | Ivo Raaijmakers, Suvi Haukka | 2003-03-18 |
| 4432810 | Method for improving luminescence and electrical properties in semiconductor materials by electron irradiation at liquid nitrogen temperatures | Albert Sicignano, Werner F. van der Weg | 1984-02-21 |