Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8464418 | Method for temperature compensation in MEMS resonators with isolated regions of distinct material | David H. Bernstein | 2013-06-18 |
| 8461935 | Hybrid system having a non-MEMS device and a MEMS device | Andrew D. McCraith, Richard S. Miller | 2013-06-11 |
| 8456252 | Dual in-situ mixing for extended tuning range of resonators | — | 2013-06-04 |
| 8436690 | Hybrid system having a non-MEMS device and a MEMS device | Andrew D. McCraith, Richard S. Miller | 2013-05-07 |
| 8427251 | Temperature compensated oscillator including MEMS resonator for frequency control | Roger T. Howe | 2013-04-23 |
| 8349635 | Encapsulated MEMS device and method to form the same | Qing-Fen Gan | 2013-01-08 |
| 8329559 | Damascene process for use in fabricating semiconductor structures having micro/nano gaps | Hideki Takeuchi, Tsu-Jae King, Roger T. Howe | 2012-12-11 |
| 8313970 | Planar microshells for vacuum encapsulated devices and damascene method of manufacture | Pezhman Monadgemi, Roger T. Howe | 2012-11-20 |
| 8288835 | Microshells with integrated getter layer | Pezhman Monadgemi, Roger T. Howe | 2012-10-16 |
| 8273594 | Planar microshells for vacuum encapsulated devices and damascene method of manufacture | Pezhman Monadgemi, Roger T. Howe | 2012-09-25 |
| 8258893 | Out-of-plane MEMS resonator with static out-of-plane deflection | David H. Bernstein, Mehrnaz Motiee | 2012-09-04 |
| 8058940 | Dual in-situ mixing for extended tuning range of resonators | — | 2011-11-15 |
| 7999635 | Out-of plane MEMS resonator with static out-of-plane deflection | David A. Bernstein, Mehrnaz Motiee | 2011-08-16 |
| 7982550 | Highly accurate temperature stable clock based on differential frequency discrimination of oscillators | Manu Seth | 2011-07-19 |
| 7956517 | MEMS structure having a stress inverter temperature-compensated resonator member | Mehrnaz Motiee, Roger T. Howe, David H. Bernstein | 2011-06-07 |
| 7923790 | Planar microshells for vacuum encapsulated devices and damascene method of manufacture | Pezhman Monadgemi, Roger T. Howe | 2011-04-12 |
| 7876167 | Hybrid system having a non-MEMS device and a MEMS device | Andrew D. McCraith, Richard S. Miller | 2011-01-25 |
| 7858422 | MEMS coupler and method to form the same | Roger T. Howe | 2010-12-28 |
| 7816166 | Method to form a MEMS structure having a suspended portion | — | 2010-10-19 |
| 7736929 | Thin film microshells incorporating a getter layer | Pezhman Monadgemi, Roger T. Howe | 2010-06-15 |
| 7659150 | Microshells for multi-level vacuum cavities | Pezhman Monadgemi, Roger T. Howe | 2010-02-09 |
| 7639104 | Method for temperature compensation in MEMS resonators with isolated regions of distinct material | David H. Bernstein | 2009-12-29 |
| 7595209 | Low stress thin film microshells | Pezhman Monadgemi, Roger T. Howe | 2009-09-29 |
| 7591201 | MEMS structure having a compensated resonating member | David H. Bernstein, Roger T. Howe | 2009-09-22 |
| 7514853 | MEMS structure having a stress inverter temperature-compensated resonating member | Roger T. Howe, David H. Bernstein | 2009-04-07 |