Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7514760 | IC-compatible MEMS structure | — | 2009-04-07 |
| 7256107 | Damascene process for use in fabricating semiconductor structures having micro/nano gaps | Hideki Takeuchi, Tsu-Jae King, Roger T. Howe | 2007-08-14 |
| 7211926 | Temperature compensated oscillator including MEMS resonator for frequency control | Roger T. Howe | 2007-05-01 |