Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6696222 | Dual damascene process using metal hard mask | Chen-Chiu Hsue | 2004-02-24 |
| 6649512 | Method for improving adhesion of a low k dielectric to a barrier layer | Chen-Chiu Hsue | 2003-11-18 |
| 6603167 | Capacitor with lower electrode located at the same level as an interconnect line | Chen-Chiu Hsue | 2003-08-05 |
| 6593225 | Method of forming a stacked dielectric layer on a semiconductor substrate having metal patterns | — | 2003-07-15 |
| 6548409 | Method of reducing micro-scratches during tungsten CMP | Chun Nien | 2003-04-15 |
| 6521523 | Method for forming selective protection layers on copper interconnects | Chen-Chiu Hsue | 2003-02-18 |
| 6514815 | Method for fabricating polysilicon capacitor | Chen-Chiu Hsue | 2003-02-04 |
| 6512260 | Metal capacitor in damascene structures | Chen-Chiu Hsue, Jen-Hann Tsai | 2003-01-28 |
| 6504205 | Metal capacitors with damascene structures | Chen-Chiu Hsue | 2003-01-07 |
| 6503835 | Method of making an organic copper diffusion barrier layer | — | 2003-01-07 |
| 6495448 | Dual damascene process | — | 2002-12-17 |
| 6495877 | Metal capacitors with damascene structures and method for forming the same | Chen-Chiu Hsue | 2002-12-17 |
| 6492226 | Method for forming a metal capacitor in a damascene process | Chen-Chiu Hsue | 2002-12-10 |
| 6486059 | Dual damascene process using an oxide liner for a dielectric barrier layer | Chen-Chiu Hsue | 2002-11-26 |
| 6483142 | Dual damascene structure having capacitors | Chen-Chiu Hsue | 2002-11-19 |
| 6472306 | Method of forming a dual damascene opening using CVD Low-K material and spin-on-polymer | Chung-I Chang | 2002-10-29 |
| 6410386 | Method for forming a metal capacitor in a damascene process | Chen-Chiu Hsue, Jen-Hann Tsai | 2002-06-25 |
| 6391713 | Method for forming a dual damascene structure having capacitors | Chen-Chiu Hsue | 2002-05-21 |
| 6376392 | PECVD process for ULSI ARL | Chung-I Chang, Hung-Wen Chiou | 2002-04-23 |
| 6358792 | Method for fabricating metal capacitor | Chen-Chiu Hsue | 2002-03-19 |
| 6338999 | Method for forming metal capacitors with a damascene process | Chen-Chiu Hsue | 2002-01-15 |
| 6242361 | Plasma treatment to improve DUV photoresist process | Chien-Mei Wang, Shuo-Yen Chou, Lai-Juh Chen | 2001-06-05 |
| 6005160 | Heterobifunctional membrane in application of artificial cornea | Ging-Ho Hsiue, Patricia Chuen-Tsuei Chung | 1999-12-21 |