Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10598706 | Method for identifying actions of electric equipment and system using the same | — | 2020-03-24 |
| 7595467 | Fault detection system and method for managing the same | Cheng-Jer Yang, Wen-Ti Lin | 2009-09-29 |
| 7117059 | Run-to-run control system and operating method of the same | — | 2006-10-03 |
| 7003366 | Diagnostic system and operating method for the same | — | 2006-02-21 |
| 6836693 | Method to predict dielectric film properties using chemical bonding measurements as input to computer modeling | — | 2004-12-28 |
| 6720885 | Method for generating a signal vibration alert | Chin Wen Lee | 2004-04-13 |
| 6704691 | Method and system for in-line monitoring process performance using measurable equipment signals | — | 2004-03-09 |
| 6586265 | Method and apparatus of tool matching for a semiconductor manufacturing process | Chia-Chun Tso | 2003-07-01 |
| 6376392 | PECVD process for ULSI ARL | Shyh-Dar Lee, Chung-I Chang | 2002-04-23 |
| 6303049 | Chemical mechanical abrasive composition for use in semiconductor processing | Tsung-Ho Lee, Tsui-Ping Yeh | 2001-10-16 |
| 6267649 | Edge and bevel CMP of copper wafer | Han-Chung Lai | 2001-07-31 |
| 5873769 | Temperature compensated chemical mechanical polishing to achieve uniform removal rates | Lai-Juh Chen | 1999-02-23 |