Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6621167 | Metal interconnect structure | Chien-Chung Lin, Cheng-Yu Hung, Chih-Hung Chen | 2003-09-16 |
| 6406978 | Method of removing silicon carbide | Neng-Hui Yang, Ming-Sheng Yang | 2002-06-18 |
| 6242361 | Plasma treatment to improve DUV photoresist process | Shyh-Dar Lee, Shuo-Yen Chou, Lai-Juh Chen | 2001-06-05 |
| 6162583 | Method for making intermetal dielectrics (IMD) on semiconductor integrated circuits using low dielectric constant spin-on polymers | Tsung-Ju Yang, Tsung-Kuei Kang | 2000-12-19 |
| 5858869 | Method for fabricating intermetal dielectric insulation using anisotropic plasma oxides and low dielectric constant polymers | Lai-Juh Chen | 1999-01-12 |