Issued Patents All Time
Showing 76–83 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5234794 | Photostructuring method | Michael Sebald, Rainer Leuschner, Siegfried Birkle, Hellmut Ahne | 1993-08-10 |
| 5234793 | Method for dimensionally accurate structure transfer in bilayer technique wherein a treating step with a bulging agent is employed after development | Michael Sebald, Rainer Leuschner, Siegfried Birkle, Hellmut Ahne | 1993-08-10 |
| 5229258 | Method for producing a resist structure | Horst Borndorfer, Eva Rissel, Rainer Leuschner, Michael Sebald, Hellmut Ahne +1 more | 1993-07-20 |
| 5194629 | Process for producing N-tertiary butoxycarbonyl-maleinimide | Eberhard Kuehn, Juergen Beck, Hellmut Ahne, Siegfried Birkle, Rainer Leuschner +2 more | 1993-03-16 |
| 5173393 | Etch-resistant deep ultraviolet resist process having an aromatic treating step after development | Michael Sebald, Rainer Leuschner, Siegfried Birkle, Hellmut Ahne | 1992-12-22 |
| 5171656 | Photosensitive composition | Michael Sebald, Juergen Beck, Rainer Leuschner, Hans Jurgen Bestmann | 1992-12-15 |
| 4812200 | Method for generating resist structures | Siegfried Birkle, Hans-Dieter Feucht, Rainer Leuschner | 1989-03-14 |
| 4791176 | Alkenylphenol and alkenylphenol ether copolymers | Siegfried Birkle, Hans-Dieter Feucht | 1988-12-13 |