Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5574556 | Stage mechanism in exposure apparatus | Tetsuzo Mori | 1996-11-12 |
| 5467637 | Method of measuring gas purity information, chamber unit and exposure unit using the method and a device production method | Takayuki Hasegawa | 1995-11-21 |
| 5356686 | X-ray mask structure | Takeshi Miyachi, Yasuaki Fukuda, Yuji Chiba, Nobutoshi Mizusawa, Takao Kariya +1 more | 1994-10-18 |
| 5253012 | Substrate holding apparatus for vertically holding a substrate in an exposure apparatus | Yuji Chiba | 1993-10-12 |
| 5134436 | Exposure control method for adjusting the temperature of a workpiece holding chuck attracting surface based on memorized data | — | 1992-07-28 |
| 5026239 | Mask cassette and mask cassette loading device | Yuji Chiba, Nobutoshi Mizusawa, Takao Kariya, Isamu Shimoda | 1991-06-25 |
| 4963921 | Device for holding a mask | Takao Kariya | 1990-10-16 |
| 4774055 | Automatic analysis apparatus | Kouichi Wakatake, Takejirou Yokosuka, Teruo Mochida, Kazutomi Yokota | 1988-09-27 |