Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11687000 | Sulfonium compound, chemically amplified resist composition, and patterning process | Masahiro Fukushima, Masaki Ohashi, Kazuhiro Katayama | 2023-06-27 |
| 11435666 | Salt compound, chemically amplified resist composition, and patterning process | Emiko Ono, Masayoshi Sagehashi, Masahiro Fukushima | 2022-09-06 |