Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032289 | Polymer, chemically amplified resist composition and patterning process | Masahiro Fukushima, Masayoshi Sagehashi | 2024-07-09 |
| 11435666 | Salt compound, chemically amplified resist composition, and patterning process | Masayoshi Sagehashi, Masahiro Fukushima, Yuki Kera | 2022-09-06 |