Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6733930 | Photomask blank, photomask and method of manufacture | Tsutomu Shinagawa, Tamotsu Maruyama, Hideo Kaneko, Yukio Inazuki, Satoshi Okazaki | 2004-05-11 |
| 6641958 | Phase shift mask blank, phase shift mask, and methods of manufacture | Yukio Inazuki, Tamotsu Maruyama, Hideo Kaneko, Masataka Watanabe, Satoshi Okazaki | 2003-11-04 |