Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11307497 | Compound, composition for forming organic film, substrate for manufacturing semiconductor apparatus, method for forming organic film, and patterning process | Seiichiro Tachibana, Takeru Watanabe, Keisuke NIIDA, Takashi SAWAMURA, Tsutomu Ogihara | 2022-04-19 |
| 11042090 | Composition for forming organic film | Seiichiro Tachibana, Daisuke KORI, Tsutomu Ogihara | 2021-06-22 |
| 11022882 | Compound and composition for forming organic film | Seiichiro Tachibana, Takeru Watanabe, Keisuke NIIDA, Takashi SAWAMURA, Tsutomu Ogihara +4 more | 2021-06-01 |
| 10604618 | Compound, method for manufacturing the compound, and composition for forming organic film | Seiichiro Tachibana, Takeru Watanabe, Keisuke NIIDA, Takashi SAWAMURA, Tsutomu Ogihara +4 more | 2020-03-31 |
| 10514605 | Resist multilayer film-attached substrate and patterning process | Seiichiro Tachibana, Tsutomu Ogihara, Romain Lallement, Karen E. Petrillo | 2019-12-24 |
| 10416563 | Resist underlayer film composition, patterning process, and method for forming resist underlayer film | Hironori Satoh, Takeru Watanabe, Daisuke KORI, Tsutomu Ogihara | 2019-09-17 |
| 10241412 | Resist underlayer film composition, patterning process, and method for forming resist underlayer film | Takeru Watanabe, Daisuke KORI, Tsutomu Ogihara | 2019-03-26 |