Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7179567 | Phase shift mask blank, phase shift mask, and method of manufacture | Yukio Inazuki, Masayuki Nakatsu, Tsuneo Numanami, Hideo Kaneko, Satoshi Okazaki | 2007-02-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7179567 | Phase shift mask blank, phase shift mask, and method of manufacture | Yukio Inazuki, Masayuki Nakatsu, Tsuneo Numanami, Hideo Kaneko, Satoshi Okazaki | 2007-02-20 |