Issued Patents All Time
Showing 76–100 of 104 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579793 | Method of achieving high adhesion of CVD copper thin films on TaN Substrates | Wei-Wei Zhuang, Wei Pan, Sheng Teng Hsu | 2003-06-17 |
| 6576293 | Method to improve copper thin film adhesion to metal nitride substrates by the addition of water | Wei-Wei Zhuang, Sheng Teng Hsu | 2003-06-10 |
| 6576292 | Method of forming highly adhesive copper thin films on metal nitride substrates via CVD | Wei-Wei Zhuang, Sheng Teng Hsu | 2003-06-10 |
| 6573134 | Dual metal gate CMOS devices and method for making the same | Yanjun Ma, Yoshi Ono, Sheng Teng Hsu | 2003-06-03 |
| 6555916 | Integrated circuit prepared by selectively cleaning copper substrates, in-situ, to remove copper oxides | Tue Nguyen, Lawrence J. Charneski, Sheng Teng Hsu | 2003-04-29 |
| 6509268 | Thermal densification in the early stages of copper MOCVD for depositing high quality Cu films with good adhesion and trench filling characteristics | Wei Pan, Sheng Teng Hsu | 2003-01-21 |
| 6509260 | Method of shallow trench isolation using a single mask | Sheng Teng Hsu | 2003-01-21 |
| 6506643 | Method for forming a damascene FeRAM cell structure | Sheng Teng Hsu | 2003-01-14 |
| 6472337 | Precursors for zirconium and hafnium oxide thin film deposition | Wei-Wei Zhuang | 2002-10-29 |
| 6410462 | Method of making low-K carbon doped silicon oxide | Hongning Yang, Sheng Teng Hsu | 2002-06-25 |
| 6303502 | MOCVD metal oxide for one transistor memory | Sheng Teng Hsu, Tingkai Li, Jer-Shen Maa, Wei-Wei Zhuang | 2001-10-16 |
| 6290736 | Chemically active slurry for the polishing of noble metals and method for same | — | 2001-09-18 |
| 6281377 | Substituted cycloalkene new copper precursors for chemical vapor deposition of copper metal thin films | Wei-Wei Zhuang, Tue Nguyen, Lawrence J. Charneski, Sheng Teng Hsu | 2001-08-28 |
| 6281589 | System of selectively cleaning copper substrate surfaces, in-situ, to remove copper oxides | Tue Nguyen, Lawrence J. Charneski, Sheng Teng Hsu | 2001-08-28 |
| 6274421 | Method of making metal gate sub-micron MOS transistor | Sheng Teng Hsu, Tue Nguyen | 2001-08-14 |
| 6245261 | Substituted phenylethylene precursor and synthesis method | Wei-Wei Zhuang, Tue Nguyen, Lawrence J. Charneski, Sheng Teng Hsu | 2001-06-12 |
| 6200866 | Use of silicon germanium and other alloys as the replacement gate for the fabrication of MOSFET | Yanjun Ma, Douglas J. Tweet, Yoshi Ono | 2001-03-13 |
| 6194310 | Method of forming amorphous conducting diffusion barriers | Sheng Teng Hsu, Douglas J. Tweet, Wei Pan | 2001-02-27 |
| 6184157 | Stress-loaded film and method for same | Sheng Teng Hsu, Hongning Yang, Tue Nguyen, Yanjun Ma | 2001-02-06 |
| 6133106 | Fabrication of a planar MOSFET with raised source/drain by chemical mechanical polishing and nitride replacement | Sheng Teng Hsu | 2000-10-17 |
| 6090963 | Alkene ligand precursor and synthesis method | Wei-Wei Zhuang, Tue Nguyen, Robert Barrowcliff, Sheng Teng Hsu | 2000-07-18 |
| 6015918 | Allyl-derived precursor and synthesis method | Wei-Wei Zhuang, Tue Nguyen, Greg Michael Stecker, Sheng Teng Hsu | 2000-01-18 |
| 5994571 | Substituted ethylene precursor and synthesis method | Wei-Wei Zhuang, Tue Nguyen, Lawrence J. Charneski, Sheng Teng Hsu | 1999-11-30 |
| 5939334 | System and method of selectively cleaning copper substrate surfaces, in-situ, to remove copper oxides | Tue Nguyen, Lawrence J. Charneski, Sheng Teng Hsu | 1999-08-17 |
| 5936707 | Multi-level reticle system and method for forming multi-level resist profiles | Tue Nguyen, Bruce D. Ulrich | 1999-08-10 |