Issued Patents All Time
Showing 51–75 of 104 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7015138 | Multi-layered barrier metal thin films for Cu interconnect by ALCVD | Wei Pan, Yoshi Ono, Sheng Teng Hsu | 2006-03-21 |
| 6992025 | Strained silicon on insulator from film transfer and relaxation by hydrogen implantation | Jer-Shen Maa, Jong-Jan Lee, Douglas J. Tweet, Allen Burmaster, Sheng Teng Hsu | 2006-01-31 |
| 6972239 | Low temperature MOCVD processes for fabrication of PrXCa1-xMnO3 thin films | Tingkai Li, Wei-Wei Zhuang, Lawrence J. Charneski, Sheng Teng Hsu | 2005-12-06 |
| 6951825 | Method of etching a SiN/Ir/TaN or SiN/Ir/Ti stack using an aluminum hard mask | Tingkai Li, Bruce D. Ulrich, Sheng Teng Hsu | 2005-10-04 |
| 6939724 | Method for obtaining reversible resistance switches on a PCMO thin film when integrated with a highly crystallized seed layer | Wei-Wei Zhuang, Tingkai Li, Sheng Teng Hsu, Wei Pan | 2005-09-06 |
| 6927074 | Asymmetric memory cell | Sheng Teng Hsu, Tingkai Li | 2005-08-09 |
| 6927120 | Method for forming an asymmetric crystalline structure memory cell | Sheng Teng Hsu, Tingkal Li, Wei-Wei Zhuang, Wei Pan | 2005-08-09 |
| 6899858 | Method of synthesis of hafnium nitrate for HfO2 thin film deposition via ALCVD process | Wei-Wei Zhuang, Sheng Teng Hsu | 2005-05-31 |
| 6849467 | MOCVD of TiO2 thin film for use as FeRAM H2 passivation layer | Tingkai Li, Wei Pan, Robert Barrowcliff, Sheng Teng Hsu | 2005-02-01 |
| 6794198 | MOCVD selective deposition of c-axis oriented Pb5Ge3O11 thin films on high-k gate oxides | Tingkai Li, Sheng Teng Hsu, Bruce D. Ulrich | 2004-09-21 |
| 6777327 | Method of barrier metal surface treatment prior to Cu deposition to improve adhesion and trench filling characteristics | Wei Pan, Jer-Shen Maa, Sheng Teng Hsu | 2004-08-17 |
| 6774054 | High temperature annealing of spin coated Pr1-xCaxMnO3 thim film for RRAM application | Fengyan Zhang, Wei-Wei Zhuang, Sheng Teng Hsu | 2004-08-10 |
| 6764537 | Copper metal precursor | Wei-Wei Zhuang, Lawrence J. Charneski, Sheng Teng Hsu | 2004-07-20 |
| 6759695 | Integrated circuit metal oxide semiconductor transistor | Yanjun Ma, Douglas J. Tweet | 2004-07-06 |
| 6723643 | Method for chemical mechanical polishing of thin films using end-point indicator structures | Wei Pan, Allen Burmaster | 2004-04-20 |
| 6720031 | Method of controlling the initial growth of CVD copper films by surface treatment of barrier metals films | Wei Pan, Sheng Teng Hsu | 2004-04-13 |
| 6716691 | Self-aligned shallow trench isolation process having improved polysilicon gate thickness control | Sheng Teng Hsu, Bruce D. Ulrich, Douglas J. Tweet, Lisa Stecker | 2004-04-06 |
| 6716744 | Ultra thin tungsten metal films used as adhesion promoter between barrier metals and copper | Wei Pan, Sheng Teng Hsu | 2004-04-06 |
| 6669870 | Substituted phenylethylene precursor synthesis method | Wei-Wei Zhuang, Tue Nguyen, Lawrence J. Charneski, Sheng Teng Hsu | 2003-12-30 |
| 6660628 | Method of MOCVD Ti-based barrier metal thin films with tetrakis (methylethylamino) titanium with octane | Wei Pan, Wei-Wei Zhuang, Sheng Teng Hsu | 2003-12-09 |
| 6632731 | Structure and method of making a sub-micron MOS transistor | Yanjun Ma, Yoshi Ono, Sheng Teng Hsu | 2003-10-14 |
| 6627510 | Method of making self-aligned shallow trench isolation | Sheng Teng Hsu, Bruce D. Ulrich, Douglas J. Tweet, Lisa Stecker | 2003-09-30 |
| 6620664 | Silicon-germanium MOSFET with deposited gate dielectric and metal gate electrode and method for making the same | Yanjun Ma, Douglas J. Tweet | 2003-09-16 |
| 6596344 | Method of depositing a high-adhesive copper thin film on a metal nitride substrate | Wei-Wei Zhuang, Lawrence J. Charneski, Sheng Teng Hsu | 2003-07-22 |
| 6586344 | Precursors for zirconium and hafnium oxide thin film deposition | Wei-Wei Zhuang | 2003-07-01 |