Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11726407 | Integrated super-resolution laser direct-writing device and direct-writing method | Aijun Zeng, Tiecheng Liu, Jingpei Hu, Linglin Zhu | 2023-08-15 |
| 9804502 | Illumination device and method for using the same in the projection lithography machine | Aijun Zeng, Yunbo Zhang, Mingxing Chen, Ying-Tzung Wang | 2017-10-31 |
| 9709896 | Illumination system for lithographic projection exposure step-and-scan apparatus | Aijun Zeng, Liqun Chen, Ruifang FANG | 2017-07-18 |
| 9400433 | Lithography illumination system | Aijun Zeng, Linglin Zhu, Ruifang FANG | 2016-07-26 |
| 9323052 | Lithography pupil shaping optical system and method for generating off-axis illumination mode | Fang Zhang, Jing Zhu, Qiang Song, Baoxi Yang, Ming-Hung Chen +4 more | 2016-04-26 |
| 9297744 | Device and method for measuring phase retardation distribution and fast axis azimuth angle distribution in real time | Aijun Zeng, Longhai Liu, Linglin Zhu | 2016-03-29 |
| 9121788 | Device and method for detecting optical performance of beam shaping element | Jing Zhu, Aijun Zeng, Zhonghua Hu, Baoxi Yang, Ming-Hung Chen | 2015-09-01 |
| 9036155 | Six-axis four-subdividing interferometer | Jianfang Chen, Zhaogu Cheng, Ya Cheng, Feng Chi | 2015-05-19 |
| 9036154 | Four-axis four-subdividing interferometer | Zhaogu Cheng, Jianfang Chen, Ya Cheng, Feng Chi | 2015-05-19 |
| 8920719 | Immunochromatographic strip disc for multiplexed detection and detection method using the same | Lei Zhou, Zongmin Du, Ruifu Yang | 2014-12-30 |
| 8173974 | Method of indirect emission by nano-materials | Yan Zheng, Jingyu Bian, Shufan Geng, Ruifu Yang, Lei Zhou +2 more | 2012-05-08 |