Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11726407 | Integrated super-resolution laser direct-writing device and direct-writing method | Tiecheng Liu, Jingpei Hu, Linglin Zhu, Huijie Huang | 2023-08-15 |
| 9804502 | Illumination device and method for using the same in the projection lithography machine | Yunbo Zhang, Mingxing Chen, Ying-Tzung Wang, Huijie Huang | 2017-10-31 |
| 9709896 | Illumination system for lithographic projection exposure step-and-scan apparatus | Liqun Chen, Ruifang FANG, Huijie Huang | 2017-07-18 |
| 9400433 | Lithography illumination system | Linglin Zhu, Ruifang FANG, Huijie Huang | 2016-07-26 |
| 9323052 | Lithography pupil shaping optical system and method for generating off-axis illumination mode | Fang Zhang, Jing Zhu, Huijie Huang, Qiang Song, Baoxi Yang +4 more | 2016-04-26 |
| 9297744 | Device and method for measuring phase retardation distribution and fast axis azimuth angle distribution in real time | Longhai Liu, Linglin Zhu, Huijie Huang | 2016-03-29 |
| 9121788 | Device and method for detecting optical performance of beam shaping element | Jing Zhu, Huijie Huang, Zhonghua Hu, Baoxi Yang, Ming-Hung Chen | 2015-09-01 |