Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11726407 | Integrated super-resolution laser direct-writing device and direct-writing method | Aijun Zeng, Tiecheng Liu, Jingpei Hu, Huijie Huang | 2023-08-15 |
| 9400433 | Lithography illumination system | Aijun Zeng, Ruifang FANG, Huijie Huang | 2016-07-26 |
| 9297744 | Device and method for measuring phase retardation distribution and fast axis azimuth angle distribution in real time | Aijun Zeng, Longhai Liu, Huijie Huang | 2016-03-29 |