Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709896 | Illumination system for lithographic projection exposure step-and-scan apparatus | Aijun Zeng, Liqun Chen, Huijie Huang | 2017-07-18 |
| 9400433 | Lithography illumination system | Aijun Zeng, Linglin Zhu, Huijie Huang | 2016-07-26 |