FC

Feng Chi

SC Shanghai Micro Electronics Equipment (Group) Co.: 2 patents #33 of 212Top 20%
Overall (All Time): #2,029,272 of 4,157,543Top 50%
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Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9036154 Four-axis four-subdividing interferometer Zhaogu Cheng, Jianfang Chen, Ya Cheng, Huijie Huang 2015-05-19
9036155 Six-axis four-subdividing interferometer Jianfang Chen, Zhaogu Cheng, Ya Cheng, Huijie Huang 2015-05-19