Issued Patents All Time
Showing 51–75 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7994021 | Method of manufacturing semiconductor device | Hidekazu Miyairi, Hironobu Shoji, Akihisa Shimomura, Eiji Higa, Shunpei Yamazaki | 2011-08-09 |
| 7978412 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | — | 2011-07-12 |
| 7972943 | Manufacturing method of semiconductor device | — | 2011-07-05 |
| 7953310 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Koichiro Tanaka | 2011-05-31 |
| 7947570 | Manufacturing method and manufacturing apparatus of semiconductor substrate | Takatsugu Omata, Hideto Ohnuma | 2011-05-24 |
| 7935584 | Method for manufacturing crystalline semiconductor device | Koichiro Tanaka | 2011-05-03 |
| 7927983 | Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device | Koichiro Tanaka | 2011-04-19 |
| 7879689 | Method of manufacturing a semiconductor device including a semiconductor substrate with stripes of different crystal plane directions | — | 2011-02-01 |
| 7851352 | Manufacturing method of semiconductor device and electronic device | — | 2010-12-14 |
| 7842565 | Beam homogenizer and laser irradiation apparatus | — | 2010-11-30 |
| 7795114 | Manufacturing methods of SOI substrate and semiconductor device | — | 2010-09-14 |
| 7790572 | Method for manufacturing semiconductor substrate | — | 2010-09-07 |
| 7772519 | Laser irradiation apparatus, laser irradiation method, and manufacturing method for a semiconductor device | Koichiro Tanaka | 2010-08-10 |
| 7709309 | Semiconductor device and manufacturing method thereof | — | 2010-05-04 |
| 7682949 | Laser treatment device, laser treatment method, and semiconductor device fabrication method | Koichiro Tanaka | 2010-03-23 |
| 7662703 | Method for manufacturing crystalline semiconductor film and semiconductor device | Koichiro Tanaka | 2010-02-16 |
| 7623292 | Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device | Koichiro Tanaka, Yoshiaki Yamamoto | 2009-11-24 |
| 7547593 | Method of fabricating semiconductor device | Hidekazu Miyairi, Atsuo Isobe, Akihisa Shimomura | 2009-06-16 |
| 7486444 | Beam homogenizer and laser irradiation apparatus | — | 2009-02-03 |
| 7450307 | Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device | Koichiro Tanaka, Yoshiaki Yamamoto | 2008-11-11 |
| 7418172 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Koichiro Tanaka | 2008-08-26 |
| 7387922 | Laser irradiation method, method for manufacturing semiconductor device, and laser irradiation system | Koichiro Tanaka, Atsuo Isobe | 2008-06-17 |
| 7187507 | Optical component and laser irradiation apparatus | Hirotada Oishi | 2007-03-06 |
| 7179699 | Method of fabricating semiconductor device | Hidekazu Miyairi, Atsuo Isobe, Akihisa Shimomura | 2007-02-20 |
| 7169630 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | — | 2007-01-30 |