Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10369658 | Laser irradiation method and laser irradiation apparatus | Koichiro Tanaka | 2019-08-06 |
| 9387553 | Laser irradiation method and laser irradiation apparatus | Koichiro Tanaka | 2016-07-12 |
| 8891170 | Laser irradiation apparatus and manufacturing method of semiconductor device | Koichiro Tanaka | 2014-11-18 |
| 8670641 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Koichiro Tanaka | 2014-03-11 |
| 8580700 | Method for manufacturing semiconductor device | Koichiro Tanaka | 2013-11-12 |
| 8512917 | Photomask | Hideaki Shishido, Yuto Yakubo | 2013-08-20 |
| 8455790 | Laser irradiation apparatus, laser irradiation method, and manufacturing method of semiconductor device | Koichiro Tanaka | 2013-06-04 |
| 8426324 | Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method | Koichiro Tanaka | 2013-04-23 |
| 8372762 | Manufacturing method of semiconductor device and laser processing apparatus | Koichiro Tanaka | 2013-02-12 |
| 8326102 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Koichiro Tanaka | 2012-12-04 |
| 8309443 | Method for manufacturing semiconductor device and laser irradiation apparatus | Koichiro Tanaka | 2012-11-13 |
| 8045271 | Laser irradiation method and laser irradiation apparatus | Koichiro Tanaka | 2011-10-25 |
| 8000016 | Laser irradiation apparatus and manufacturing method of semiconductor device | Koichiro Tanaka | 2011-08-16 |
| 7940441 | Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method | Koichiro Tanaka | 2011-05-10 |
| 7916987 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Koichiro Tanaka | 2011-03-29 |
| 7807483 | Method for manufacturing display device | Shunpei Yamazaki, Koichiro Tanaka, Hironobu Shoji | 2010-10-05 |
| 7732351 | Manufacturing method of semiconductor device and laser processing apparatus | Koichiro Tanaka | 2010-06-08 |
| 7618882 | Method for manufacturing semiconductor device and laser irradiation apparatus | Koichiro Tanaka | 2009-11-17 |
| 7595932 | Laser irradiation method and laser irradiation apparatus | Koichiro Tanaka | 2009-09-29 |
| 7532378 | Laser irradiation apparatus, method of laser irradiation, and method for manufacturing semiconductor device | Koichiro Tanaka | 2009-05-12 |
| 7524712 | Method for manufacturing a semiconductor device and laser irradiation method and laser irradiation apparatus | Koichiro Tanaka, Shunpei Yamazaki | 2009-04-28 |
| 7486856 | Beam homogenizer and laser irradiation apparatus | Koichiro Tanaka | 2009-02-03 |
| 7405114 | Laser irradiation apparatus and method of manufacturing semiconductor device | — | 2008-07-29 |
| 7387954 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Koichiro Tanaka | 2008-06-17 |
| 7187507 | Optical component and laser irradiation apparatus | Tomoaki Moriwaka | 2007-03-06 |