Issued Patents All Time
Showing 26–50 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728559 | Device, manufacturing method thereof, and electronic device | Hidekazu Miyairi | 2017-08-08 |
| 9564323 | Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device | Koichiro Tanaka | 2017-02-07 |
| 9553202 | Semiconductor device, manufacturing method thereof, and electronic device | Motomu Kurata, Shinya Sasagawa, Ryota HODO, Katsuaki TOCHIBAYASHI, Jiro Nishida +2 more | 2017-01-24 |
| 9276125 | Semiconductor device and method for manufacturing the same | Akihisa Shimomura, Daigo Ito | 2016-03-01 |
| 9177811 | Method for manufacturing semiconductor device | — | 2015-11-03 |
| 8993421 | Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device | Koichiro Tanaka | 2015-03-31 |
| 8985173 | Manufacturing method and manufacturing apparatus of semiconductor substrate | Takatsugu Omata, Hideto Ohnuma | 2015-03-24 |
| 8802534 | Method for forming SOI substrate and apparatus for forming the same | Yoshihiro Komatsu, Kojiro Takahashi | 2014-08-12 |
| 8735186 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | — | 2014-05-27 |
| 8722521 | Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device | Koichiro Tanaka | 2014-05-13 |
| 8703579 | Method of manufacturing semiconductor device | Hidekazu Miyairi, Hironobu Shoji, Akihisa Shimomura, Eiji Higa, Shunpei Yamazaki | 2014-04-22 |
| 8653568 | Semiconductor substrate with stripes of different crystal plane directions and semiconductor device including the same | — | 2014-02-18 |
| 8623675 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | — | 2014-01-07 |
| 8530788 | Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device | Koichiro Tanaka | 2013-09-10 |
| 8507334 | Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device | Koichiro Tanaka | 2013-08-13 |
| 8457463 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Koichiro Tanaka | 2013-06-04 |
| 8440941 | Heat treatment apparatus, heat treatment method and method for manufacturing semiconductor device | Akihiro Narita, Hideto Ohnuma, Shunpei Yamazaki | 2013-05-14 |
| 8432021 | Manufacturing method of SOI substrate | — | 2013-04-30 |
| 8349714 | Method of crystallizing semiconductor film and method of manufacturing semiconductor device | Koichiro Tanaka, Takatsugu Omata, Junpei Momo | 2013-01-08 |
| 8278739 | Crystalline semiconductor film, semiconductor device, and method for manufacturing thereof | — | 2012-10-02 |
| 8216892 | Method for manufacturing crystalline semiconductor film | Koichiro Tanaka | 2012-07-10 |
| 8178438 | Manufacturing method of semiconductor device and electronic device | — | 2012-05-15 |
| 8168510 | Method for manufacturing semiconductor layer and semiconductor device | — | 2012-05-01 |
| 8058709 | Semiconductor device and manufacturing method thereof | — | 2011-11-15 |
| 7994023 | Manufacturing methods of SOI substrate and semiconductor device | — | 2011-08-09 |