TM

Tomoaki Moriwaka

SL Semiconductor Energy Laboratory: 80 patents #123 of 1,113Top 15%
Overall (All Time): #22,632 of 4,157,543Top 1%
80
Patents All Time

Issued Patents All Time

Showing 76–80 of 80 patents

Patent #TitleCo-InventorsDate
7112517 Laser treatment device, laser treatment method, and semiconductor device fabrication method Koichiro Tanaka 2006-09-26
7078281 Method of manufacturing a semiconductor device by providing a mirror in the attenuation region Koichiro Tanaka 2006-07-18
6841434 Method of fabricating semiconductor device Hidekazu Miyairi, Atsuo Isobe, Akihisa Shimomura 2005-01-11
6765175 Laser irradiation apparatus, laser irradiation method, and manufacturing method for a semiconductor device Koichiro Tanaka 2004-07-20
6750423 Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device Koichiro Tanaka 2004-06-15