EH

Eiji Higa

SL Semiconductor Energy Laboratory: 13 patents #471 of 1,113Top 45%
Overall (All Time): #384,328 of 4,157,543Top 10%
13
Patents All Time

Issued Patents All Time

Showing 1–13 of 13 patents

Patent #TitleCo-InventorsDate
8895407 Manufacturing method of SOI substrate and manufacturing method of semiconductor device Hidekazu Miyairi, Akihisa Shimomura, Tatsuya Mizoi, Yoji Nagano 2014-11-25
8871610 Method for manufacturing SOI substrate Akihisa Shimomura, Masaki Koyama 2014-10-28
8772128 Method for manufacturing semiconductor device Shunpei Yamazaki, Junpei Momo, Fumito Isaka, Masaki Koyama, Akihisa Shimomura 2014-07-08
8703579 Method of manufacturing semiconductor device Hidekazu Miyairi, Hironobu Shoji, Akihisa Shimomura, Tomoaki Moriwaka, Shunpei Yamazaki 2014-04-22
8563431 Method for manufacturing semiconductor device Hidekazu Miyairi 2013-10-22
8343847 Manufacturing method of SOI semiconductor device Masaki Koyama, Junpei Momo, Hiroaki Honda, Tamae Moriwaka, Akihisa Shimomura 2013-01-01
8313989 SOI substrate and method for manufacturing the same Hideto Ohnuma 2012-11-20
8216914 Method for manufacturing SOI substrate and method for manufacturing semiconductor device Masaki Koyama, Kosei Nei, Toru Hasegawa, Junpei Momo 2012-07-10
8193068 Method of manufacturing SOI substrate Shunpei Yamazaki, Yoji Nagano, Tatsuya Mizoi, Akihisa Shimomura 2012-06-05
7994021 Method of manufacturing semiconductor device Hidekazu Miyairi, Hironobu Shoji, Akihisa Shimomura, Tomoaki Moriwaka, Shunpei Yamazaki 2011-08-09
7927991 Method for manufacturing semiconductor device Hidekazu Miyairi, Yasuhiro Jinbo, Shunpei Yamazaki 2011-04-19
7897476 Method of manufacturing SOI substrate Shunpei Yamazaki, Yoji Nagano, Tatsuya Mizoi, Akihisa Shimomura 2011-03-01
7820524 Manufacturing method of SOI substrate and manufacturing method of semiconductor device Hidekazu Miyairi, Akihisa Shimomura, Tatsuya Mizoi, Yoji Nagano 2010-10-26