Issued Patents All Time
Showing 226–250 of 502 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7594965 | Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device | — | 2009-09-29 |
| 7589032 | Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment | Shunpei Yamazaki, Hidekazu Miyairi, Aiko Shiga, Akihisa Shimomura, Mai Akiba | 2009-09-15 |
| 7585791 | Laser irradiation method, laser irradiation apparatus and method for manufacturing semiconductor device | Yoshiaki Yamamoto | 2009-09-08 |
| 7582162 | Semiconductor device and semiconductor device production system | Atsuo Isobe, Shunpei Yamazaki, Koji Dairiki, Hiroshi Shibata, Chiho Kokubo +5 more | 2009-09-01 |
| 7569441 | Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device | — | 2009-08-04 |
| 7566669 | Laser irradiation apparatus and laser irradiation method | Yoshiaki Yamamoto | 2009-07-28 |
| 7563661 | Crystallization method for semiconductor film, manufacturing method for semiconductor device, and laser irradiation apparatus | — | 2009-07-21 |
| 7560660 | Laser irradiation method and apparatus | Shunpei Yamazaki | 2009-07-14 |
| 7560397 | Laser irradiation method and method of manufacturing a semiconductor device | Shunpei Yamazaki, Hiroshi Shibata, Masaaki Hiroki, Mai Akiba | 2009-07-14 |
| 7558223 | OFDM receiving method of OFDM receiver for receiving an OFDM signal via a plurality of space paths | Naganori Shirakata, Shuya Hosokawa | 2009-07-07 |
| 7557991 | Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device | Hirotada Ohishi | 2009-07-07 |
| 7551655 | Laser irradiation apparatus, laser irradiation method and method for manufacturing semiconductor device | Yoshiaki Yamamoto | 2009-06-23 |
| 7547866 | Laser irradiation method and method for manufacturing semiconductor device including an autofocusing mechanism using the same | Yoshiaki Yamamoto | 2009-06-16 |
| 7538350 | Semiconductor thin film device | Atsuo Isobe, Koji Dairiki, Hiroshi Shibata, Chiho Kokubo, Tatsuya Arao +5 more | 2009-05-26 |
| 7532378 | Laser irradiation apparatus, method of laser irradiation, and method for manufacturing semiconductor device | Hirotada Oishi | 2009-05-12 |
| 7532238 | Apparatus and method for controlling a camera based on a displayed image | Hiroki Yonezawa | 2009-05-12 |
| 7528079 | Method of changing an energy attenuation factor of a linear light in order to crystallize a semiconductor film | Shunpei Yamazaki | 2009-05-05 |
| 7524712 | Method for manufacturing a semiconductor device and laser irradiation method and laser irradiation apparatus | Hirotada Oishi, Shunpei Yamazaki | 2009-04-28 |
| 7521699 | Apparatus and method for doping | Shunpei Yamazaki, Toshiji Hamatani | 2009-04-21 |
| 7521326 | Semiconductor device and manufacturing method thereof | — | 2009-04-21 |
| 7517774 | Laser annealing method | Naoto Kusumoto | 2009-04-14 |
| 7513949 | Method and apparatus for producing semiconductor device | Shunpei Yamazaki | 2009-04-07 |
| 7510920 | Manufacturing method for a thin film transistor that uses a pulse oscillation laser crystallize an amorphous semiconductor film | Shunpei Yamazaki, Akihisa Shimomura, Hisashi Ohtani, Masaaki Hiroki, Aiko Shiga +2 more | 2009-03-31 |
| 7498212 | Laser annealing method and semiconductor device fabricating method | — | 2009-03-03 |
| 7488940 | Reflection type terahertz spectrometer and spectrometric method | Hideyuki Ohtake, Makoto Yoshida, Masaya Nagai | 2009-02-10 |