Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910219 | Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device | Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura, Atsuo Isobe | 2021-02-02 |
| 10366885 | Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device | Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura, Atsuo Isobe | 2019-07-30 |
| 9748099 | Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device | Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura, Atsuo Isobe | 2017-08-29 |
| 8696808 | Laser irradiation apparatus | Shunpei Yamazaki, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka, Satoshi Murakami +1 more | 2014-04-15 |
| 8686315 | Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device | Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura, Atsuo Isobe | 2014-04-01 |
| 8198173 | Method for manufacturing SOI substrate | Hideto Ohnuma, Kenichiro Makino, Yoichi Iikubo, Masaharu Nagai | 2012-06-12 |
| 8093593 | Semiconductor device having multichannel transistor | Chiho Kokubo, Shunpei Yamazaki, Hidekazu Miyairi, Koji Dairiki, Koichiro Tanaka | 2012-01-10 |
| 8044372 | Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment | Shunpei Yamazaki, Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura, Mai Akiba | 2011-10-25 |
| 7943885 | Laser irradiation method and method of manufacturing semiconductor device | Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura, Atsuo Isobe | 2011-05-17 |
| 7892952 | Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment | Shunpei Yamazaki, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka, Mai Akiba | 2011-02-22 |
| 7829432 | Method for manufacturing SOI substrate | Hideto Ohnuma, Kenichiro Makino, Yoichi Iikubo, Masaharu Nagai | 2010-11-09 |
| 7736917 | Laser beam irradiation method and method of manufacturing a thin firm transistor | Akihisa Shimomura, Kenji Kasahara, Hidekazu Miyairi, Koichiro Tanaka, Koji Dairiki | 2010-06-15 |
| 7670935 | Manufacturing method of semiconductor device | Shunpei Yamazaki, Akihisa Shimomura, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka +2 more | 2010-03-02 |
| 7635883 | Method for manufacturing semiconductor device | Munehiro Azami, Chiho Kokubo, Atsuo Isobe, Hiroshi Shibata, Shunpei Yamazaki | 2009-12-22 |
| 7589032 | Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment | Shunpei Yamazaki, Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura, Mai Akiba | 2009-09-15 |
| 7510920 | Manufacturing method for a thin film transistor that uses a pulse oscillation laser crystallize an amorphous semiconductor film | Shunpei Yamazaki, Akihisa Shimomura, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka +2 more | 2009-03-31 |
| 7439115 | Semiconductor fabricating apparatus | Shunpei Yamazaki, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka, Mai Akiba | 2008-10-21 |
| 7319055 | Method of fabricating a semiconductor device utilizing crystallization of semiconductor region with laser beam | Chiho Kokubo, Yoshifumi Tanada, Shunpei Yamazaki | 2008-01-15 |
| 7279372 | Manufacturing method of semiconductor device | Shunpei Yamazaki, Akihisa Shimomura, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka +2 more | 2007-10-09 |
| 7217952 | Method of manufacturing a semiconductor device and semiconductor manufacturing apparatus | Setsuo Nakajima, Naoki Makita, Takuya Matsuo | 2007-05-15 |
| 7176042 | Laser beam irradiation method that includes determining a thickness of semiconductor prior to crystallizing | Akihisa Shimomura, Kenji Kasahara, Hidekazu Miyairi, Koichiro Tanaka, Koji Dairiki | 2007-02-13 |
| 7138306 | Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device | Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura, Atsuo Isobe | 2006-11-21 |
| 7135389 | Irradiation method of laser beam | Shunpei Yamazaki, Chiho Kokubo, Koichiro Tanaka, Hidekazu Miyairi, Koji Dairiki | 2006-11-14 |
| 7129121 | Method for manufacturing semiconductor device | Munehiro Azami, Chiho Kokubo, Atsuo Isobe, Hiroshi Shibata, Shunpei Yamazaki | 2006-10-31 |
| 7109069 | Semiconductor device and method of manufacturing the same | Chiho Kokubo, Shunpei Yamazaki, Hidekazu Miyairi, Koji Dairiki, Koichiro Tanaka | 2006-09-19 |