Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7105048 | Laser irradiation apparatus | Shunpei Yamazaki, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka, Satoshi Murakami +1 more | 2006-09-12 |
| 7087504 | Method of manufacturing a semiconductor device by irradiating with a laser beam | Setsuo Nakajima, Naoki Makita, Takuya Matsuo | 2006-08-08 |
| 7050878 | Semiconductror fabricating apparatus | Shunpei Yamazaki, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka, Mai Akiba | 2006-05-23 |
| 7037809 | Method of manufacturing semiconductor device using a laser irradiation process | Shunpei Yamazaki, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka, Mai Akiba | 2006-05-02 |
| 7015079 | Semiconductor film, semiconductor device, and method of manufacturing the same including adding metallic element to the amorphous semiconductor film and introducing oxygen after crystallization | Hidekazu Miyairi, Katsumi Nomura, Naoki Makita, Takuya Matsuo | 2006-03-21 |
| 6979605 | Manufacturing method for a semiconductor device using a marker on an amorphous semiconductor film to selectively crystallize a region with a laser light | Shunpei Yamazaki, Akihisa Shimomura, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka +2 more | 2005-12-27 |
| 6962860 | Method of manufacturing a semiconductor device | Shunpei Yamazaki, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka, Akihisa Shimomura +1 more | 2005-11-08 |
| 6911358 | Method for manufacturing semiconductor device | Munehiro Azami, Chiho Kokubo, Atsuo Isobe, Hiroshi Shibata, Shunpei Yamazaki | 2005-06-28 |
| 6844523 | Laser apparatus, laser irradiation method, manufacturing method for a semiconductor device, semiconductor device and electronic equipment | Shunpei Yamazaki, Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura | 2005-01-18 |
| 6797550 | Semiconductor device and manufacturing method therefor | Chiho Kokubo, Yoshifumi Tanada, Shunpei Yamazaki | 2004-09-28 |
| 6777713 | Irregular semiconductor film, having ridges of convex portion | Hidekazu Miyairi, Katsumi Nomura, Naoki Makita, Takuya Matsuo | 2004-08-17 |
| 6767799 | Laser beam irradiation method | Akihisa Shimomura, Kenji Kasahara, Hidekazu Miyairi, Koichiro Tanaka, Koji Dairiki | 2004-07-27 |
| 6764886 | Manufacturing method of semiconductor device | Shunpei Yamazaki, Akihisa Shimomura, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka +2 more | 2004-07-20 |
| 6700096 | LASER APPARATUS, LASER IRRADIATION METHOD, MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, PRODUCTION SYSTEM FOR SEMICONDUCTOR DEVICE USING THE LASER APPARATUS, AND ELECTRONIC EQUIPMENT | Shunpei Yamazaki, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka, Mai Akiba | 2004-03-02 |