Issued Patents All Time
Showing 276–300 of 502 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7387954 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Hirotada Oishi | 2008-06-17 |
| 7384832 | Method of manufacturing a semiconductor device | — | 2008-06-10 |
| 7374985 | Laser irradiation apparatus and method for manufacturing semiconductor device | — | 2008-05-20 |
| 7375010 | Laser irradiation device | — | 2008-05-20 |
| 7371620 | Apparatus and method for laser radiation | Shunpei Yamazaki, Satoshi Teramoto, Naoto Kusumoto | 2008-05-13 |
| 7372630 | Laser, irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device | — | 2008-05-13 |
| 7362784 | Laser irradiation method, laser irradiation apparatus, and semiconductor device | Shunpei Yamazaki | 2008-04-22 |
| 7359412 | Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device | Hidekazu Miyairi, Akihisa Shimomura, Tamae Takano, Masaki Koyama | 2008-04-15 |
| 7352789 | Laser light irradiation apparatus and laser light irradiation method | — | 2008-04-01 |
| 7351647 | Method of irradiating a laser beam, apparatus for irradiating a laser beam and method of fabricating semiconductor devices | — | 2008-04-01 |
| 7351646 | Laser annealing method and laser annealing device | Naoto Kusumoto, Shunpei Yamazaki | 2008-04-01 |
| 7348227 | Semiconductor device and manufacturing method thereof | Shunpei Yamazaki, Naoto Kusumoto, Hideto Ohnuma | 2008-03-25 |
| 7346235 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | — | 2008-03-18 |
| 7336737 | Phase error correction circuit and receiver incorporating the same | Hideki Nakahara, Kenichi Mori, Yoshio Urabe, Hitoshi Takai | 2008-02-26 |
| 7336685 | Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device | — | 2008-02-26 |
| 7327916 | Beam Homogenizer, laser irradiation apparatus, and method of manufacturing a semiconductor device | — | 2008-02-05 |
| 7326630 | Method of fabricating semiconductor device utilizing laser irradiation | Hidekazu Miyairi, Hironobu Shoji | 2008-02-05 |
| 7315035 | Apparatus and method for doping | Shunpei Yamazaki, Toshiji Hamatani | 2008-01-01 |
| 7306981 | Semiconductor manufacturing method | Hideaki Kuwabara | 2007-12-11 |
| 7304005 | Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device | Shunpei Yamazaki | 2007-12-04 |
| 7303980 | Laser annealing method and apparatus | Shunpei Yamazaki, Naoto Kusumoto | 2007-12-04 |
| 7300516 | Laser irradiation method and laser irradiation apparatus, and method for fabricating semiconductor device | Shunpei Yamazaki | 2007-11-27 |
| 7294874 | Laser irradiation method, method for manufacturing a semiconductor device, and a semiconductor device | — | 2007-11-13 |
| 7294589 | Laser irradiation apparatus | — | 2007-11-13 |
| 7282380 | Method for manufacturing semiconductor device | Junya Maruyama, Atsuo Isobe, Susumu Okazaki, Yoshiaki Yamamoto, Koji Dairiki +1 more | 2007-10-16 |