Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11530375 | Substrate cleaning compositions, substrate cleaning method and substrate treating apparatus | Hae-Won Choi, Kihoon Choi, Jaeseong Lee, Chan Young Heo, Anton Koriakin +1 more | 2022-12-20 |
| 11410862 | Apparatus for processing substrate including cooling member closer to central axis than heating member | Jaeseong Lee, Kihoon Choi, Hae-Won Choi, Anton Koriakin, Chan Young Heo +1 more | 2022-08-09 |
| 11149234 | Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same | Mi Hyun Park, Jung-Min Oh, Young-Hoo Kim, Hyo-San Lee, Tae-Keun Kim +3 more | 2021-10-19 |
| 10908503 | Apparatus for treating substrate | Kihoon Choi, Chan Young Heo, Do Heon Kim, Hae-Won Choi, Jaeseong Lee +1 more | 2021-02-02 |
| 9353236 | Acrylamide-based mesoporous polymer and preparation method thereof | Yang-Kyoo Han, Je Gwon Lee, Dae-Won Sohn, Sung-Hwan Han, Hyun-Hoon Song +1 more | 2016-05-31 |
| 9109063 | Acrylamide-based mesoporous polymer and preparation method thereof | Yang-Kyoo Han, Je Gwon Lee, Dae-Won Sohn, Sung-Hwan Han, Hyun-Hoon Song +1 more | 2015-08-18 |