Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2003-01-28 |
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-09-17 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-02-19 |
| 6104734 | Solid state laser apparatus | Tadao Ino, Hirofumi Sukeda, Hideki Saga, Tsuyoshi Miyai | 2000-08-15 |