Issued Patents All Time
Showing 76–100 of 121 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7050937 | Performance measurement system | — | 2006-05-23 |
| 6576053 | Method of forming thin film using atomic layer deposition method | Yeong-kwan Kim, Young-Wook Park, Jae-Soon Lim, Sung-Je Choi | 2003-06-10 |
| 6570253 | Multi-layer film for a thin film structure and a capacitor using the same | Jae-Soon Lim, Yeong-kwan Kim, Heung-Soo Park | 2003-05-27 |
| 6478872 | Method of delivering gas into reaction chamber and shower head used to deliver gas | Yun-sook Chae, In-Sang Jeon, Sang-Bom Kang, Kyu Wan Ryu | 2002-11-12 |
| 6391769 | Method for forming metal interconnection in semiconductor device and interconnection structure fabricated thereby | Jong-Myeong Lee, Hyun-Seok Lim, Byung-Hee Kim, Gil-Heyun Choi | 2002-05-21 |
| 6376355 | Method for forming metal interconnection in semiconductor device | Mee-Young Yoon | 2002-04-23 |
| 6372598 | Method of forming selective metal layer and method of forming capacitor and filling contact hole using the same | Sang-Bum Kang, Yun-sook Chae, Hyun-Seok Lim, Mee-Young Yoon | 2002-04-16 |
| 6358829 | Semiconductor device fabrication method using an interface control layer to improve a metal interconnection layer | Mee-Young Yoon, Hyun-Seok Lim | 2002-03-19 |
| 6284591 | Formation method of interconnection in semiconductor device | — | 2001-09-04 |
| 6270572 | Method for manufacturing thin film using atomic layer deposition | Yeong-kwan Kim, Chang-Soo Park, Sang Min Lee | 2001-08-07 |
| 6211082 | Chemical vapor deposition of tungsten using nitrogen-containing gas | Bong-young Yoo, Byung-Lyul Park, Dae-hong Ko | 2001-04-03 |
| 6207487 | Method for forming dielectric film of capacitor having different thicknesses partly | Yeong-kwan Kim, Chang-Soo Park, Young Sun Kim | 2001-03-27 |
| 6197683 | Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact of semiconductor device using the same | Sang-Bom Kang, Chang-Soo Park, Yun-sook Chae | 2001-03-06 |
| 6180447 | Methods for fabricating integrated circuit capacitors including barrier layers having grain boundary filling material | Chang-Soo Park, Hong-ku Paik | 2001-01-30 |
| 6174809 | Method for forming metal layer using atomic layer deposition | Sang-Bom Kang, Yun-sook Chae, Chang-Soo Park | 2001-01-16 |
| 6156644 | Method for forming interconnects for semiconductor devices using reaction control layers, and interconnects formed thereby | Kwang Man Ko | 2000-12-05 |
| 6144060 | Integrated circuit devices having buffer layers therein which contain metal oxide stabilized by heat treatment under low temperature | In-seon Park, Yeong-kwan Kim, Byung-Hee Kim, Sang Min Lee, Chang-Soo Park | 2000-11-07 |
| 6139700 | Method of and apparatus for forming a metal interconnection in the contact hole of a semiconductor device | Sang-Bom Kang | 2000-10-31 |
| 6140671 | Semiconductor memory device having capacitive storage therefor | — | 2000-10-31 |
| 6087257 | Methods of fabricating a selectively deposited tungsten nitride layer and metal wiring using a tungsten nitride layer | Byung-Lyul Park, Jung-Min Ha, Dae-hong Ko | 2000-07-11 |
| 6013576 | Methods for forming an amorphous tantalum nitride film | Jae-Eung Oh, Chang-Soo Park | 2000-01-11 |
| 6001660 | Methods of forming integrated circuit capacitors using metal reflow techniques | Young-soh Park, Cheol Seong Hwang, Doo-sup Hwang, Hag-Ju Cho | 1999-12-14 |
| 6001683 | Formation method of interconnection in semiconductor device | — | 1999-12-14 |
| 5998870 | Wiring structure of semiconductor device and method for manufacturing the same | Sun Ho Ha | 1999-12-07 |
| 5970309 | Method of manufacturing a capacitor and a capacitor electrode in semiconductor device | Jung-Min Ha, Byung-Lyul Park, Dae-hong Ko | 1999-10-19 |